Copyright © 2005,
Intop-Precision all rights reserved. |
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UPM-laserinterferometer |
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ultra precision measuring system,
10 nm resolution, max. distance 500 mm
compact, rigid sensor (dia.17 mm)
laser wavelength: 780 nm
sinusoidal output (390 nm / period) 10 nm A quad B optional
retroreflecting sphere, dia. 2 mm
driver box (euro format: 100mm x 160mm)
external supply voltages via VG 64
front connector for pc card (evaluation board)
optional index compensation best for OEM-applications
Download Illustration as PDF |
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